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As an example, The present concave OC could be replaced by a airplane mirror which could mitigate the facility density over the area of M1 plus the diamond. Additionally, working with substantial hurt threshold coatings for M1 and diamond would also improve the output power with no damages. Then, the NIR laser with the 2nd Stokes wavelength can be superior more than enough, and its fantastic beam good quality, to produce the ultimate DUV laser at 193 nm having a superior normal electrical power.
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The two the 1040 nm and 1078 nm laser come from a single dual-wavelength Yb-doped website fiber laser. Each and every laser is amplified by phases of fiber amplifier and Yb-doped components amplifier, respectively.
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Tunable ultraviolet laser supply dependant on good-point out dye laser technology and CsLiB6O10 harmonic generation
The conversion effectiveness from elementary NIR to DUV is from 5% to 36% based on the claimed results in Desk one. Rising the conversion efficiency will reduce the stress on the design and setup of the elemental laser amplifier in addition to the electric energy consumption. A great beam high-quality of the elemental laser will also lead for the escalating of your conversion efficiency along with the right electrical power depth of the NIR and green laser while in the SHG and FHG method, respectively. The highest conversion efficiencies from NIR to eco-friendly and environmentally friendly to DUV laser by usage of CLBO crystal are 70% and around fifty%, respectively [twelve], which corresponds to the conversion efficiency of 35% from fundamental to DUV.
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